用全息测试板干涉测量凸球面

J. Burge, D. Anderson
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引用次数: 0

摘要

斯图尔德天文台镜面实验室正在研究一种测量大型高度非球面凸透镜的新方法。这种新的干涉测试使用全孔径测试板,在凹球形参考表面上制作计算机生成的全息图(CGH)(见图1)。通过测试板可以观察到干涉条纹,测试板被支撑在距二次面几毫米的地方。全息图由金属环形环组成,其间距小至80 μm,大至500 μm。使用该技术的表面测量精度有望优于50 nm的P-V和8 nm的rms,与最佳拟合球的距离达331 μm。相当高的精度可以获得较少的非球面。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Interferometric measurement of convex aspheres using holographic test plates
A new method of measuring large, highly aspheric convex secondary mirrors is being pursued at the Steward Observatory Mirror Lab. This new interferometric test uses a full-aperture test plate with a computer-generated hologram (CGH) fabricated onto a concave spherical reference surface (See Fig. 1). Fringes of interference are viewed through the test plate, which is supported several millimeters from the secondary. The hologram consists of annular rings of metal spaced at intervals as small as 80 μm and as large as 500 μm. The accuracy of the surface measurement using this technique is expected to be better than 50 nm P-V and 8 nm rms for mirrors with up to 331 μm departure from the best-fit sphere. Considerably higher accuracy can be attained for less aspheric surfaces.
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