五氧化二钽薄膜中的电击穿和电致发光

1988. Annual Report., Conference on Electrical Insulation and Dielectric Phenomena Pub Date : 1988-10-16 DOI:10.1109/CEIDP.1988.26332

K. Miyairi

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引用次数: 1

摘要

本文研究了在氩等离子体溅射中阳极氧化得到的Ta/ sub2 /O/ sub5 /薄膜的高场电击穿和电致发光。电致发光对电场的依赖性较强，对温度的依赖性较弱。击穿附近高场区的电致发光与电极注入的电子雪崩有关。发射光的光谱在600纳米处有一个峰值。

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Electrical breakdown and electroluminescence in tantalum pentoxide films

The author investigated electric breakdown and electroluminescence at high field in Ta/sub 2/O/sub 5/ thin films obtained by anodizing Ta foils and films sputtered in an argon plasma. The electroluminescence manifests a strong dependence on electric field, but weak dependence on temperature. Electroluminescence in the high-field region near the breakdown is associated with electron avalanche by injected electrons from the electrode. The spectrum of the emitted light has a peak at 600 nm.<>

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1988. Annual Report., Conference on Electrical Insulation and Dielectric Phenomena

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