Xinruo Yi, Kehao Zhao, Yuqi Li, Qirui Wang, M. Buric, R. Wright, Kevin P. Chen
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A Tapered Intrinsic Fabry-Perot Interferometer Fabricated by a CO2 Laser and its Application as a Refractive Index Sensor
We present a highly reproducible method of fabricating a tapered intrinsic Fabry-Perot interferometer device with 6-µm taper waist through an integrated femtosecond and CO2 laser approach. This device demonstrates a minimal refractive index sensing resolution ~2×10-5.