金属有机化学气相沉积in /sub x/Ga/sub 1-x/N外延膜的光学过程

Semiconducting and Insulating Materials 1998. Proceedings of the 10th Conference on Semiconducting and Insulating Materials (SIMC-X) (Cat. No.98CH36159) Pub Date : 1998-06-01 DOI:10.1109/SIM.1998.785116

W. Shan, J. Ager, W. Walukiewicz, E. Haller

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