优化变速13.56 MHz射频等离子体阻抗匹配器电可变电容电感设计规则

{"title":"优化变速13.56 MHz射频等离子体阻抗匹配器电可变电容电感设计规则","authors":"Hee-Won Choi, Y. Suh, J. Min","doi":"10.6113/tkpe.2023.28.2.105","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":185846,"journal":{"name":"THE TRANSACTIONS OF KOREAN INSTITUTE OF POWER ELECTRONICS","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Inductor Design Rule in Electrical Variable Capacitor for 13.56 MHz RF Plasma Impedance Matcher with Optimized Variable Speed\",\"authors\":\"Hee-Won Choi, Y. Suh, J. Min\",\"doi\":\"10.6113/tkpe.2023.28.2.105\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":185846,\"journal\":{\"name\":\"THE TRANSACTIONS OF KOREAN INSTITUTE OF POWER ELECTRONICS\",\"volume\":\"40 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-04-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"THE TRANSACTIONS OF KOREAN INSTITUTE OF POWER ELECTRONICS\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.6113/tkpe.2023.28.2.105\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"THE TRANSACTIONS OF KOREAN INSTITUTE OF POWER ELECTRONICS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.6113/tkpe.2023.28.2.105","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}