Material's outgassing and surface modification of TiN coating film

In order to meet microwave devices' growing demand on material's vacuum properties, the author carries out preliminary exploration of the process of material's outgassing and its causes, the diffusion characteristics of different gases in material. It is pointed out that on the basis of maintaining its original physical and chemical properties, material's vacuum properties can be improved by surface modification. At last, this paper compares the volumes of the emitted gases of stainless steel coated by TiN film and stainless steel without TiN film, after they are both roasted by high temperature. The result confirms that the surface modification, TiN film can improve the vacuum properties of the material.