脉冲多弧离子源对镍铬铁合金薄膜的研究

Cai Chanlong, Han Lingxia, Zhu Chang, Wang Jimei, Yan Yixin
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引用次数: 0

摘要

本文介绍了一种脉冲多弧离子源镀镍铬铁合金薄膜的新技术。在研究工作中,获得了用该技术制备薄膜的工艺,并对薄膜的性能进行了测试。结果表明,该工艺参数、工艺、膜的均匀性和硬度都是合适的。脉冲多弧离子源的薄膜材料与正极材料的成分含量误差小于/spl + /3%。这部电影符合实际需求。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Study on nickel-chrome-iron alloy film by means of the pulse multi-arc ion source
In this paper, a new technique plating the nickel-chrome-iron alloy film by means of the pulse multi-arc ion source is introduced. In research work, the plating technology of the film with this technique is obtained and the property of the film is measured. Result indicated that the technology parameters, the technique, the uniformity and firmness of the film is appropriate. The error of the composition content between the film material and the cathode material of the pulse multi-arc ion source is less than /spl plusmn/3%. The film accords with actual demands.
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