Evaluation of a multiphysical RF MEMS oscillator based on LTE receiver performance requirements

A simulation methodology dealing with the complexity of multiphysical micro electro mechanical system (MEMS) models and their evaluation according to RF specification is presented. It is focused towards the evaluation of a hybrid MEMS-CMOS RF oscillator prior to its realization, based on the demodulation performance of a long-term evolution (LTE) user equipment (UE). The proposed multiphysical simulation approach enables to meet the constraints of the receiver specification, the design rules for manufacturing and the implementation with the novel silicon-ceramic composite substrate (SiCer) based on co-simulation and a parametrized behavioral model of the MEMS resonator. Thus, allowing to successfully address the constraints at the different abstraction levels of the design and manufacturing processes.