用于产生高焦深环形图案的复合轴-轴衍射光学元件

SPIE OPTO Pub Date : 2016-03-15 DOI:10.1117/12.2213037
Raghu Dharmavarapu, A. Vijayakumar, R. Brunner, S. Bhattacharya
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引用次数: 0

摘要

针对无限共轭模式,设计了双菲涅耳带轴透镜(FZA),并将折射率轴透镜的相位轮廓与之相结合,生成了复合衍射光学元件(DOE)。针对两个焦距设计的FZA在两个焦平面之间沿传播方向产生一条线聚焦。轴突产生的环形图案通过这个距离聚焦,圆环的半径取决于传播距离。因此,在设计过程中,可以在两个焦平面内调谐聚焦环图案的半径。这两个函数的积分是通过改变FZA区域相对于折射率轴的相位分布的位置来实现的,从而得到二元复合DOE。分别针对不同的焦深值和基角设计FZAs和轴轴,以实现每个元素在焦深内的不同环半径。用标量衍射公式对元件进行了数值模拟,分析了元件的聚焦特性。采用电子束直写的方法制备了do,并利用光纤耦合二极管激光器对其进行了评价。由do产生的可调谐环形图案在微钻以及圆形衍射和折射光学元件的微加工中具有广阔的应用前景。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Composite axilens-axicon diffractive optical elements for generation of ring patterns with high focal depth
A binary Fresnel Zone Axilens (FZA) is designed for the infinite conjugate mode and the phase profile of a refractive axicon is combined with it to generate a composite Diffractive Optical Element (DOE). The FZA designed for two focal lengths generates a line focus along the propagation direction extending between the two focal planes. The ring pattern generated by the axicon is focused through this distance and the radius of the ring depends on the propagation distance. Hence, the radius of the focused ring pattern can be tuned, during the design process, within the two focal planes. The integration of the two functions was carried out by shifting the location of zones of FZA with respect to the phase profile of the refractive axicon resulting in a binary composite DOE. The FZAs and axicons were designed for different focal depth values and base angles respectively, in order to achieve different ring radii within the focal depth of each element. The elements were simulated using scalar diffraction formula and their focusing characteristics were analyzed. The DOEs were fabricated using electron beam direct writing and evaluated using a fiber coupled diode laser. The tunable ring patterns generated by the DOEs have prospective applications in microdrilling as well as microfabrication of circular diffractive and refractive optical elements.
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