{"title":"电子器件用导电铜线的激光诱导写入","authors":"W. Wang, M. Seufert, A. Lenhart, W. Jillek","doi":"10.1109/AGEC.2004.1290896","DOIUrl":null,"url":null,"abstract":"The direct writing of conductive copper lines on alumina substrates by means of a Nd/YAG-laser was investigated as an alternative to established thick-film and thin-film hybrid technology. Copper powder in the low micrometer range was sprayed as an aqueous dispersion on the surface of alumina substrates normally used for thick-film hybrids. With proper setting of the laser parameters, conductor lines with good adhesion and a relatively smooth surface were achieved. After removal of the excessive copper powder, the remaining copper particles acted as seeds for a subsequent electroless copper plating thus providing an electrical conductivity sufficient for electronic devices.","PeriodicalId":291057,"journal":{"name":"2004 International IEEE Conference on the Asian Green Electronics (AGEC). Proceedings of","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Laser induced writing of conductive copper lines for electronic devices\",\"authors\":\"W. Wang, M. Seufert, A. Lenhart, W. Jillek\",\"doi\":\"10.1109/AGEC.2004.1290896\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The direct writing of conductive copper lines on alumina substrates by means of a Nd/YAG-laser was investigated as an alternative to established thick-film and thin-film hybrid technology. Copper powder in the low micrometer range was sprayed as an aqueous dispersion on the surface of alumina substrates normally used for thick-film hybrids. With proper setting of the laser parameters, conductor lines with good adhesion and a relatively smooth surface were achieved. After removal of the excessive copper powder, the remaining copper particles acted as seeds for a subsequent electroless copper plating thus providing an electrical conductivity sufficient for electronic devices.\",\"PeriodicalId\":291057,\"journal\":{\"name\":\"2004 International IEEE Conference on the Asian Green Electronics (AGEC). Proceedings of\",\"volume\":\"13 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-09-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2004 International IEEE Conference on the Asian Green Electronics (AGEC). Proceedings of\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/AGEC.2004.1290896\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2004 International IEEE Conference on the Asian Green Electronics (AGEC). Proceedings of","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/AGEC.2004.1290896","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Laser induced writing of conductive copper lines for electronic devices
The direct writing of conductive copper lines on alumina substrates by means of a Nd/YAG-laser was investigated as an alternative to established thick-film and thin-film hybrid technology. Copper powder in the low micrometer range was sprayed as an aqueous dispersion on the surface of alumina substrates normally used for thick-film hybrids. With proper setting of the laser parameters, conductor lines with good adhesion and a relatively smooth surface were achieved. After removal of the excessive copper powder, the remaining copper particles acted as seeds for a subsequent electroless copper plating thus providing an electrical conductivity sufficient for electronic devices.