金属晶粒度对栅极全能硅纳米线晶体管的影响

Tara Prasanna Dash, S. Dey, J. Jena, S. Das, E. Mohapatra, C. K. Maiti
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引用次数: 3

摘要

正如预测的那样,5nm技术要到2025年才能投入生产,它将是某种FinFET(可能是栅极全能硅纳米线或类似类型的器件)。现在是时候寻找先进的器件结构,如纳米线。在这项工作中,首次进行了TCAD模拟,以评估1nm栅长圆柱形硅沟道纳米线场效应晶体管(NW-FET)在极端尺度限制下的潜力。本文研究了金属晶粒粒度(MGG)对栅极全通(GAA) NW-FET器件的影响,以了解阈值电压、通断电流、亚阈值斜率和漏极诱导势垒降低等性能指标的变化。结果表明,栅极全方位nw - fet由于具有更好的沟道静电控制,在未来的技术节点上具有取代finfet的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Metal Grain Granularity Induced Variability in Gate-All-Around Si-Nanowire Transistors at 1nm Technology Node
As predicted, 5nm technology is not going to be ready for production until 2025 and it will be some sort of FinFET (possibly gate-all-around silicon nanowire or similar type of devices). It is time to search for advanced device structures such as nanowires. In this work, TCAD simulations are performed for the first time to evaluate the potential of 1nm gate length cylindrical Si channel nanowire field effect transistors (NW-FET) at extreme scaling limits. Effects of metal grain granularity (MGG) of the gate-all-around (GAA) NW-FET device have been studied to understand variability of the performance metrics such as, the threshold voltage, on-current, off-current, sub-threshold slope and drain induced barrier lowering. It is shown that the gate-all-around NW-FETs have the potential to replace FinFETs in future technology nodes because of their better channel electrostatic control.
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