Z. Mei, H. Bi, Qing Cao, Yuqing Wang, Wenyu Lin, Junfeng Ye, Xudi Wang
{"title":"再吸附作用下窄结构真空装置本征放气速率的研究","authors":"Z. Mei, H. Bi, Qing Cao, Yuqing Wang, Wenyu Lin, Junfeng Ye, Xudi Wang","doi":"10.1116/6.0002906","DOIUrl":null,"url":null,"abstract":"The narrow structure within the vacuum system usually results in a slow evacuation process. Additionally, the high outgassing rate caused by the large surface-to-volume ratio can prevent the vacuum level from meeting the performance requirements of the device. In this paper, the evacuation of the stainless steel parallel plates is established based on a two-dimensional equation combined with the outgassing theory of the recombination–dissociation-limited model. The relationship between the measured and intrinsic outgassing rates was investigated by varying the gap size, pump-out port size, and temperature. The results show that the internal pressure is nonuniformly distributed during the pump-down process, even reaching a quasiequilibrium state. This indicates that the widely used throughput method can make a difference in measuring outgassing rates. This provides a theoretical basis for testing intrinsic outgassing rates, calculating pressure distribution, and configuring pumps or getters in complex vacuum systems.","PeriodicalId":282302,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"32 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Investigation of the intrinsic outgassing rates for narrow structured vacuum devices under readsorption effect\",\"authors\":\"Z. Mei, H. Bi, Qing Cao, Yuqing Wang, Wenyu Lin, Junfeng Ye, Xudi Wang\",\"doi\":\"10.1116/6.0002906\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The narrow structure within the vacuum system usually results in a slow evacuation process. Additionally, the high outgassing rate caused by the large surface-to-volume ratio can prevent the vacuum level from meeting the performance requirements of the device. In this paper, the evacuation of the stainless steel parallel plates is established based on a two-dimensional equation combined with the outgassing theory of the recombination–dissociation-limited model. The relationship between the measured and intrinsic outgassing rates was investigated by varying the gap size, pump-out port size, and temperature. The results show that the internal pressure is nonuniformly distributed during the pump-down process, even reaching a quasiequilibrium state. This indicates that the widely used throughput method can make a difference in measuring outgassing rates. This provides a theoretical basis for testing intrinsic outgassing rates, calculating pressure distribution, and configuring pumps or getters in complex vacuum systems.\",\"PeriodicalId\":282302,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology B\",\"volume\":\"32 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology B\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0002906\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology B","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0002906","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Investigation of the intrinsic outgassing rates for narrow structured vacuum devices under readsorption effect
The narrow structure within the vacuum system usually results in a slow evacuation process. Additionally, the high outgassing rate caused by the large surface-to-volume ratio can prevent the vacuum level from meeting the performance requirements of the device. In this paper, the evacuation of the stainless steel parallel plates is established based on a two-dimensional equation combined with the outgassing theory of the recombination–dissociation-limited model. The relationship between the measured and intrinsic outgassing rates was investigated by varying the gap size, pump-out port size, and temperature. The results show that the internal pressure is nonuniformly distributed during the pump-down process, even reaching a quasiequilibrium state. This indicates that the widely used throughput method can make a difference in measuring outgassing rates. This provides a theoretical basis for testing intrinsic outgassing rates, calculating pressure distribution, and configuring pumps or getters in complex vacuum systems.