亚波长包层中红外器件

J. S. Penadés, M. Nedeljkovic, A. Khokhar, G. Mashanovich, A. Ortega-Moñux, Gonzalo Wanguermert-Perez, R. Halir, Í. Molina-Fernández, P. Cheben
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引用次数: 0

摘要

悬浮结构通过去除有损耗的埋藏氧化物(BOX)层,使中红外波长硅波导中的低损耗传播成为可能。我们之前演示了带有硅芯和亚波长光栅(SWG)横向包层的悬浮波导,它允许使用氢氟酸进行下蚀刻。在这个平台上,弯管、多模干涉耦合器(MMI)和马赫-曾德干涉仪(MZI)都可以成功实现。具体来说,我们报道了波导的传播损耗为1.2 dB/cm, 90°弯曲为0.03 dB/弯曲损耗,紧凑的MMI耦合器的不平衡为0.5 dB,以及消光比超过24 dB的MZI结构。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Sub-wavelength cladding mid-infrared devices
Suspended structures enable low loss propagation in silicon waveguides for mid-infrared wavelengths by removing the lossy buried oxide (BOX) layer. We previously demonstrated suspended waveguides with a silicon core and a sub-wavelength grating (SWG) lateral cladding, which allows access to the buried oxide layer for under-etching with hydrofluoric acid. Here we show that bends, multimode interference couplers (MMI) and Mach-Zehnder interferometers (MZI) can be successfully implemented in this platform. Specifically, we report waveguides with propagation losses of 1.2 dB/cm, 90° bends with 0.03 dB/bend loss, compact MMI couplers with imbalances of 0.5 dB, and MZI structures with extinction ratios in excess of 24 dB.
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