激光烧蚀铝羽流的发射与质谱分析

Acta Physica Sinica (overseas Edition) Pub Date : 1999-03-20 DOI:10.1088/1004-423X/8/3/010

Cheng Jin-hai, Wang Pei-nan, G. Zhao, Li Fuming

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引用次数: 1

摘要

研究了激光烧蚀羽流在可见光区3Πi-3Πi (0-0) AlN波段的发射光谱和部分N+和N发射谱线。观察到斯塔克位移和斯塔克展宽。利用飞行时间质谱分析了烧蚀羽流中的组分。利用N (2D)发射谱线的Stark位移和Stark展宽计算了电子密度和温度。利用质谱和Saha方程估计了AlN+、Al+、N+、AlN、N和Al的密度。

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EMISSION AND MASS SPECTRAL ANALYSES OF LASER ABLATED AlN PLUMES

The emission spectrum of the 3Πi-3Πi (0-0) AlN band and some N+ and N emission lines have been studied in the visible region for the laser ablated plumes. The Stark-shift and Stark broadening were observed. The component species in the ablated plumes were analyzed by time of flight mass spectroscopy. The electron density and the temperature were calculated from the Stark-shift and Stark broadening of N (2D) emission line. The densities of AlN+, Al+, N+, AlN, N and Al were estimated by the mass spectra and the Saha equation.

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Acta Physica Sinica (overseas Edition)

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