薄膜多层GaAs/AlGaAs中红外折射率的高精度测量

Optical Interference Coatings Conference (OIC) 2022 Pub Date : 1900-01-01 DOI:10.1364/oic.2022.wa.5

L. Perner, G. Winkler, G. Truong, D. Follman, J. Fellinger, Maximilian Prinz, S. Puchegger, G. Cole, O. Heckl

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引用次数: 1

摘要

我们报告了一种通过分析FTIR透射光谱和通过SEM提取层厚度来测量两种或多种材料在沉积薄膜结构中的折射率的方法，对GaAs/AlGaAs DBR产生了良好的结果。

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High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers

We report a method to measure the refractive index of two or more materials in as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

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Optical Interference Coatings Conference (OIC) 2022

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