用于一维离子寻址的快速压电扫描MEMS反射镜

2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI:10.1109/OMN.2019.8925168

Paul Janin, R. Bauer, P. Griffin, E. Riis, D. Uttamchandani

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引用次数: 5

摘要

我们提出了一种小型压电MEMS微镜，谐振频率在300 kHz以上，用于一维扫描。该装置旨在通过减少现有设计的规模来实现更高频率的操作，并使用多用户绝缘体上硅工艺制造。利用自由空间光学实验装置验证了该反射镜沿单轴寻址的性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Fast piezoelectric scanning MEMS mirror for 1D ion addressing

We present a small-scale piezoelectric MEMS micromirror, with resonant frequencies above 300 kHz for 1D scanning. The device is intended for higher frequency operation by reducing the scale of existing designs, and was fabricated using a multi-user silicon-on-insulator process. The performance of the mirror for addressing points along one axis was demonstrated using a free-space optics experimental setup.

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2019 International Conference on Optical MEMS and Nanophotonics (OMN)

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