机械加工对氧化铝陶瓷二次电子发射的影响

Suharyanto, S. Michizono, Y. Saito, Tumiran, Y. Yamano, S. Kobayashi
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引用次数: 2

摘要

采用单脉冲电子束(100 pA, 1 ms)扫描电子显微镜测量了三种不同表面处理的氧化铝陶瓷的二次电子发射(SEE)系数。机械磨削处理后,退火氧化铝的平均粗糙度与烧结氧化铝基本相同,但其SEE系数有所降低。镜面加工样品的SEE系数最小。讨论了光滑表面和粗糙表面的SEE系数随一次电子入射角的变化
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Influence of Mechanical Finishing on Secondary Electron Emission of Alumina Ceramics
Secondary electron emission (SEE) coefficients of alumina ceramics with three different surface finishes have been measured using a scanning electron microscope with a single-pulse electron beam (100 pA, 1 ms). SEE coefficients of those aluminas with annealing process became lower after mechanical grinding operations even though its average roughness was almost same as those of as-sintered ones. SEE coefficients of mirror-finished samples were the smallest among the samples. Changes of SEE coefficient with incident angle of primary electrons for smooth and rough surfaces are also discussed
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