新型Nb-Ti-O混合氧化物p型气敏薄膜

Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI:10.1109/ICSENS.2003.1279117

E. Comini, G. Sberveglieri, M. Ferroni, S. Polizzi, V. Guidi, G. Martinelli

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引用次数: 0

摘要

采用反应溅射法制备了不同浓度的铌钛混合氧化物薄膜，并制备了p型感测层。通过扫描电镜、透射电镜和原子力显微镜进行了结构和形态研究，以了解传感性能的测量。这种薄膜对乙醇和一氧化碳很敏感。结果还表明，退火温度和铌含量对薄膜的气体响应有很大影响，使薄膜从典型的TiO/sub /和大多数金属氧化物传感器的n型响应转变为p型响应，这一特性对不同气体的区分至关重要。

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Novel p-type gas sensing thin film based on Nb-Ti-O mixed oxides

Thin films with variable concentrations of niobium and titanium mixed oxides have been achieved by reactive sputtering process and p-type sensing layers have been achieved. Structural and morphological studies have been carried out by means of SEM, TEM and AFM in order to understand the measurement of sensing performance. The films proved sensitive to ethanol and carbon monoxide. It was also shown that annealing temperature and niobium content strongly influence the gas response of the films leading from n-type response typical of TiO/sub 2/ and the most of metal oxide sensors to p-type response and this peculiarity is crucial for the discrimination of different gases.

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Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)

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