用于汽车雷达的两层FO-WLP AiPs的开发

S. W. Ho, Hsiao Hsiang-Yao, Lau Boon Long, Sharon Lim Pei Siang, Lim Teck Guan, C. T. Chong
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引用次数: 0

摘要

介绍了一种用于77 GHz汽车雷达的扇出晶圆级封装(FO-WLP)、封装天线(AiP)测试车。AiP测试车辆由三层Cu再分配线组成,采用双层模具结构。天线阵列在顶层模具复合层上制造,MMIC器件芯片在底层模具复合层中植入。这种双层模具结构的创建是为了减少AiP的外形因素。为了选择适合FO-WLP AiP测试车辆制造的候选材料,进行了一系列的材料评估。对模具复合材料和光介电材料的加工性能、可靠性和电性能进行了评价。临时粘接胶粘剂和载体类型也评估了它们的粘接/脱粘性能和翘曲。采用“模具优先”的工艺流程,用选定的材料制备AiP试验车辆,并对制备的样品进行可靠性试验。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of Two-Tier FO-WLP AiPs for Automotive Radar Application
A Fan-out wafer level package (FO-WLP), Antenna in Package (AiP) test vehicle built for 77 GHz automotive radar was demonstrated in this paper. The AiP test vehicle is made up of three layers of Cu redistribution lines in a two-tier mold construction. The antenna arrays are manufactured on the top tier mold compound layer, while the MMIC device chips are implanted in the bottom tier mold compound layer. This two-tier mold structure was created to reduce the form factor of the AiP. A series of material evaluation was performed to select suitable material candidates for the FO-WLP AiP test vehicle fabrication. Mold compound and photo-dielectric were evaluated for their process-ability, reliability and electrical performance. Temporary bonding adhesive and carrier types were also evaluated for their bonding/de-bonding performance and warpage. AiP test vehicles were fabricated with the selected materials using the "mold-first" process flow and reliability test was performed on the fabricated samples.
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