一种提高半导体检测质量的超压检测系统

Hsin-Wen Ting, Chin-Ming Hsu
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引用次数: 0

摘要

半导体测试技术的进步提高了器件的质量和可靠性。晶圆上的测试策略无疑是一个重要的课题。晶圆级测试对晶圆进行刻划,选择好的封装模具。然而,从测试的内在分布中识别异常值变得越来越困难。令人不快的过度杀戮也是一个需要解决的问题。在测试室中,集成电路缺陷判断的常用方法与测试工程师的经验知识密切相关。为此,本文提出了一种系统的测试方法,以提高测试质量。将该系统应用于实际半导体产品中,测试时间缩短了50%左右,测试正确性提高了99%。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
An overkill detection system for improving the testing quality of semiconductor
The advance in semiconductor testing technology have improved the device quality and reliability. The testing strategy applied to dies at the wafer is definitely an important topic. The wafer-level testing scribes the wafer and selects the good dies for packaging. However, it has become increasingly difficult to identify outliers from the intrinsic distribution at test. The disagreeable overkill is also an issue addressed. In testing house, the common way to judge defects of integrated circuit (IC) is highly related to the empirical knowledge of test engineer. As a result, a systematic testing method is proposed to improve the testing quality in this paper. Applying the system to a real semiconductor product, about 50-% testing time reduction and 99-% testing correctness are achieved.
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