{"title":"利用薄膜磁传感器重建磁探头附近的纳米分辨率磁场","authors":"S. Yamakawa, K. Amaya, M. Parameswaran","doi":"10.1109/ICSENS.2007.355879","DOIUrl":null,"url":null,"abstract":"This paper presents the nano-resolution measurement of magnetic fields near a magnetic probe using a thin-film magnetic sensor. The measurement method consists of a process, where the thin-film magnetic sensor is scanned over the sample, followed by a deconvolution scheme. In the scanning process, the thin-film magnetic sensor is scanned over the sample perpendicularly to the sensor. The sample is rotated horizontally under the sensor so that data measurements are obtained at different angles and positions. The deconvolution can be performed using existing methods, which are common in the field of computed tomography. An experiment was performed to verify the technique's capability of measuring a magnetic field using a thin-film magnetic sensor. Currently, thin-film magnetic sensors are used as reading heads in hard drive disks (HDD). At present, the film thickness of the heads is less than 10nm. Previously, the resolution of the measurement was limited by the width of the sensor (ie. 100nm) which is always greater than the thickness. However, the new technique has the same resolution as the film thickness (ie. 10nm).","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Nano-resolution reconstruction of magnetic fields near a magnetic probe using a thin-film magnetic sensor\",\"authors\":\"S. Yamakawa, K. Amaya, M. Parameswaran\",\"doi\":\"10.1109/ICSENS.2007.355879\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents the nano-resolution measurement of magnetic fields near a magnetic probe using a thin-film magnetic sensor. The measurement method consists of a process, where the thin-film magnetic sensor is scanned over the sample, followed by a deconvolution scheme. In the scanning process, the thin-film magnetic sensor is scanned over the sample perpendicularly to the sensor. The sample is rotated horizontally under the sensor so that data measurements are obtained at different angles and positions. The deconvolution can be performed using existing methods, which are common in the field of computed tomography. An experiment was performed to verify the technique's capability of measuring a magnetic field using a thin-film magnetic sensor. Currently, thin-film magnetic sensors are used as reading heads in hard drive disks (HDD). At present, the film thickness of the heads is less than 10nm. Previously, the resolution of the measurement was limited by the width of the sensor (ie. 100nm) which is always greater than the thickness. However, the new technique has the same resolution as the film thickness (ie. 10nm).\",\"PeriodicalId\":233838,\"journal\":{\"name\":\"2006 5th IEEE Conference on Sensors\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 5th IEEE Conference on Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2007.355879\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 5th IEEE Conference on Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2007.355879","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Nano-resolution reconstruction of magnetic fields near a magnetic probe using a thin-film magnetic sensor
This paper presents the nano-resolution measurement of magnetic fields near a magnetic probe using a thin-film magnetic sensor. The measurement method consists of a process, where the thin-film magnetic sensor is scanned over the sample, followed by a deconvolution scheme. In the scanning process, the thin-film magnetic sensor is scanned over the sample perpendicularly to the sensor. The sample is rotated horizontally under the sensor so that data measurements are obtained at different angles and positions. The deconvolution can be performed using existing methods, which are common in the field of computed tomography. An experiment was performed to verify the technique's capability of measuring a magnetic field using a thin-film magnetic sensor. Currently, thin-film magnetic sensors are used as reading heads in hard drive disks (HDD). At present, the film thickness of the heads is less than 10nm. Previously, the resolution of the measurement was limited by the width of the sensor (ie. 100nm) which is always greater than the thickness. However, the new technique has the same resolution as the film thickness (ie. 10nm).