利用薄膜磁传感器重建磁探头附近的纳米分辨率磁场

S. Yamakawa, K. Amaya, M. Parameswaran
{"title":"利用薄膜磁传感器重建磁探头附近的纳米分辨率磁场","authors":"S. Yamakawa, K. Amaya, M. Parameswaran","doi":"10.1109/ICSENS.2007.355879","DOIUrl":null,"url":null,"abstract":"This paper presents the nano-resolution measurement of magnetic fields near a magnetic probe using a thin-film magnetic sensor. The measurement method consists of a process, where the thin-film magnetic sensor is scanned over the sample, followed by a deconvolution scheme. In the scanning process, the thin-film magnetic sensor is scanned over the sample perpendicularly to the sensor. The sample is rotated horizontally under the sensor so that data measurements are obtained at different angles and positions. The deconvolution can be performed using existing methods, which are common in the field of computed tomography. An experiment was performed to verify the technique's capability of measuring a magnetic field using a thin-film magnetic sensor. Currently, thin-film magnetic sensors are used as reading heads in hard drive disks (HDD). At present, the film thickness of the heads is less than 10nm. Previously, the resolution of the measurement was limited by the width of the sensor (ie. 100nm) which is always greater than the thickness. However, the new technique has the same resolution as the film thickness (ie. 10nm).","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Nano-resolution reconstruction of magnetic fields near a magnetic probe using a thin-film magnetic sensor\",\"authors\":\"S. Yamakawa, K. Amaya, M. Parameswaran\",\"doi\":\"10.1109/ICSENS.2007.355879\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents the nano-resolution measurement of magnetic fields near a magnetic probe using a thin-film magnetic sensor. The measurement method consists of a process, where the thin-film magnetic sensor is scanned over the sample, followed by a deconvolution scheme. In the scanning process, the thin-film magnetic sensor is scanned over the sample perpendicularly to the sensor. The sample is rotated horizontally under the sensor so that data measurements are obtained at different angles and positions. The deconvolution can be performed using existing methods, which are common in the field of computed tomography. An experiment was performed to verify the technique's capability of measuring a magnetic field using a thin-film magnetic sensor. Currently, thin-film magnetic sensors are used as reading heads in hard drive disks (HDD). At present, the film thickness of the heads is less than 10nm. Previously, the resolution of the measurement was limited by the width of the sensor (ie. 100nm) which is always greater than the thickness. However, the new technique has the same resolution as the film thickness (ie. 10nm).\",\"PeriodicalId\":233838,\"journal\":{\"name\":\"2006 5th IEEE Conference on Sensors\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 5th IEEE Conference on Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2007.355879\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 5th IEEE Conference on Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2007.355879","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

本文介绍了利用薄膜磁传感器对磁探头附近磁场进行纳米分辨率测量的方法。测量方法包括一个过程,其中薄膜磁传感器在样品上扫描,然后是反褶积方案。在扫描过程中,薄膜磁性传感器垂直于传感器对样品进行扫描。样品在传感器下水平旋转,以便在不同角度和位置获得数据测量。反褶积可以使用现有的方法进行,这些方法在计算机断层扫描领域中很常见。通过实验验证了该技术在薄膜磁传感器上测量磁场的能力。目前,薄膜磁传感器被用作硬盘(HDD)的读取头。目前,磁头的薄膜厚度小于10nm。以前,测量的分辨率受到传感器宽度的限制。100nm),它总是大于厚度。然而,新技术具有与薄膜厚度(即厚度)相同的分辨率。10 nm)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Nano-resolution reconstruction of magnetic fields near a magnetic probe using a thin-film magnetic sensor
This paper presents the nano-resolution measurement of magnetic fields near a magnetic probe using a thin-film magnetic sensor. The measurement method consists of a process, where the thin-film magnetic sensor is scanned over the sample, followed by a deconvolution scheme. In the scanning process, the thin-film magnetic sensor is scanned over the sample perpendicularly to the sensor. The sample is rotated horizontally under the sensor so that data measurements are obtained at different angles and positions. The deconvolution can be performed using existing methods, which are common in the field of computed tomography. An experiment was performed to verify the technique's capability of measuring a magnetic field using a thin-film magnetic sensor. Currently, thin-film magnetic sensors are used as reading heads in hard drive disks (HDD). At present, the film thickness of the heads is less than 10nm. Previously, the resolution of the measurement was limited by the width of the sensor (ie. 100nm) which is always greater than the thickness. However, the new technique has the same resolution as the film thickness (ie. 10nm).
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信