超薄氧化锆薄膜覆盖金属尖场发射的能谱特征和电流-电压曲线

I. S. Turmyshev, A. Murzakaev, O. Timoshenkova
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引用次数: 1

摘要

基于ZrO2/W异质结构的热场发射阴极是目前广泛应用的点电子源。目前,仅在场发射条件下讨论了这类阴极的伏安特性(VACH)和能谱同时研究的结果。首先,在超高真空条件下,采用热场扩散法在针形钨阴极表面涂覆ZrO2薄膜(~ 10 nm)。在这种情况下,钨发射体作为参考图案,并在涂层前测量其特性。结果表明,在Fowler-Nordheim坐标系下绘制的涂层发射体VACH具有与“金属”VACH相反的非线性特征。VACH的这种行为可能与VACH测量过程中获得的复杂能谱和薄膜复杂的电子结构有关。在光谱图上有两个峰,它们之间的距离取决于发射电压,距离为3-5 eV。结果表明,涂层阴极能谱具有良好的结构。最后,涂层阴极的功函数比纯W阴极低2 eV。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Field emission from metal tips covered by ultra-thin films of Zirkonia energy spectra features and current-voltage curves
Thermofield emission cathodes based on ZrO2/W heterostructures are widely used as a point electron source nowadays. At present issue results of simultaneous study of Volt-Ampere characteristics (VACH) and energy spectra of such cathodes are discussed just under field emission terms. Firstly, needle shaped tungsten cathodes were coated by thin (~ 10 nm) film of ZrO2 by means of thermo-field diffusion methods under ultra high vacuum conditions. In this case the tungsten emitters were used as reference patterns and their characteristics were measured before the coating process. It is shown that VACH of coated emitters plotted in Fowler-Nordheim coordinates has non-linear character contrarily to “metallic” VACH. Such behavior of VACH may be attributed to complicated energy spectra obtained during VACH measurement and complex electronic structure of thin film. There are two peaks on the spectra plot with 3-5 eV distance between them depending on emission voltage. It is shown that energy spectra of coated cathodes may have fine structure. Finally, the work function of the coated cathodes is lower by 2 eV in comparison to pure W cathodes.
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