紫外准分子激光束均匀化在微加工中的应用

Optics and Photonics Letters Pub Date : 2011-12-01 DOI:10.1142/S1793528811000226

A. F. Zhou

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引用次数: 7

摘要

采用传统微透镜阵列和衍射漫射设计了紫外准分子激光束传输系统。在熔融二氧化硅上获得了具有锋利边缘的超平坦和超光滑的烧蚀表面。用原子力显微镜对熔融二氧化硅进行烧蚀，得到了深度为5.9 μm，表面粗糙度小于10 nm的烧蚀表面。

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UV EXCIMER LASER BEAM HOMOGENIZATION FOR MICROMACHINING APPLICATIONS

A UV excimer laser beam delivery system is designed with conventional microlens arrays and diffractive diffuse. Ultraflat and ultrasmooth ablated surfaces with sharp edges are obtained on fused silica. Ablated surfaces of a depth of 5.9 μm with less than 10 nm surface roughness are obtained on fused silica, as measured by an atomic force microscope.

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Optics and Photonics Letters

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