喷墨印刷介孔氧化铟基近垂直输运薄膜晶体管及伪cmos逆变器

Nehru Devabharathi, J. R. Pradhan, S. Dasgupta
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摘要

氧化物半导体正日益成为新兴印刷和柔性电子领域的首选材料。真空沉积非晶氧化物半导体tft在溶液处理/印刷电子领域引起了极大的研究关注,同时在透明和曲面显示行业也取得了重大的商业成功。尽管如此,可以注意到,尽管n型氧化物表现出优异的电子输运,但空穴导电p型氧化物的性能仍然令人不满意,因此它影响了所有氧化物互补金属氧化物半导体(CMOS)电路的制造。为了解决这个问题,最近提出了单极耗尽负载型伪cmos逆变器。在这方面,我们展示了一种共连续中孔氧化铟薄膜晶体管(TFT)技术,具有边缘场效应晶体管结构和近垂直传输。在下一步,高性能,单极耗尽负载型逆变器已被制造使用这些边场效应晶体管tft。所制备的tft具有1.95 mA的平均通流和优异的通/关比(>107)。另一方面,耗尽负载型逆变器在VDD= 2 V电源电压下表现出尖锐的电压转移特性(VTC),最大信号增益为58。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Inkjet-printed mesoporous indium oxide-based near-vertical transport thin film transistors and pseudo-CMOS inverters
Oxide semiconductors are increasingly becoming the material of choice in the emerging printed and flexible electronics domain. While they have attracted tremendous research attention in the area of solution processed/printed electronics, the vacuum deposited amorphous oxide semiconductor TFTs have also achieved serious commercial success in the transparent and curved display industries. Nonetheless, it may be noted that although the n-type oxides demonstrate excellent electronic transport, the performance of the hole conducting p-type oxides are still unsatisfactory and thus it affects the fabrication of all oxide complementary metal oxide semiconductor (CMOS) circuits. In order to resolve the issue, unipolar depletion-load type pseudo-CMOS inverters have recently been proposed. In this regard, here, we demonstrate a co-continuous mesoporous indium oxide based thin film transistor (TFT) technology with edge-FET architecture and near vertical transport. At the next step, high performance, unipolar depletion-load type inverters have been fabricated using these edge-FET TFTs. The fabricated TFTs have shown average ON-current of 1.95 mA alongside excellent On/Off ratio (>107). On the other hand, the depletion-load type inverters have demonstrated sharp voltage transfer characteristics (VTC) with a maximum signal gain of 58 at VDD= 2 V, supply voltage.
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