用于射频应用的柔性和超薄玻璃基板

Sridhar Sivapurapu, R. Chen, M. Rehman, Kimiyuki Kanno, Takenori Kakutani, M. Letz, Fuhan Liu, S. Sitaraman, M. Swaminathan
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引用次数: 6

摘要

玻璃已被证明是一个有能力的核心基板材料的高频应用。在本文中,我们研究了超薄玻璃作为一种可用于高频柔性应用的柔性材料的能力。本文讨论的两个堆叠层的总厚度为$60\ \mu\ mathm {m}$,核心玻璃基板(Schott AF32)的厚度为$30\ \mu\ mathm {m}$。一个堆叠使用$15\ \mu\mathrm{m}$ JSR GT-N01作为累积介质,另一个使用$15\ \mu\mathrm{m}$ Taiyo照片可成像介质。由于这两种堆叠先前都没有电特性,因此本文使用微带环形谐振器(mrr)和导体背侧共面波导(cbcpw)表征了高达110 GHz的堆叠。根据表征结果,这些堆叠与用于该频率范围内应用的其他堆叠相比具有优势。在完成电气特性之后,Taiyo PID堆叠也因其使用自由电弧弯曲的灵活性而具有机械特性。自由弧弯曲测试表明,超薄玻璃堆叠适用于高频弯曲应用,因为测试样品能够弯曲到样品总长度的33%,显示了这种超薄玻璃基板作为柔性基板的良好候选的能力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Flexible and Ultra-Thin Glass Substrates for RF Applications
Glass has been shown to be a capable core substrate material for high frequency applications. In this paper we examine the capabilities of ultra-thin glass as a flexible material that can be used for high frequency flexible applications. The two stack-ups discussed in this paper are $60\ \mu\mathrm{m}$ in total thickness with a core glass substrate (Schott AF32) of $30\ \mu\mathrm{m}$ thickness. One stack-up uses $15\ \mu\mathrm{m}$ JSR GT-N01 as a buildup dielectric and the other uses $15\ \mu\mathrm{m}$ Taiyo Photo Imageable Dielectric. Since neither of these stack-ups have previously been electrically characterized, this paper characterizes both stack-ups up to 110 GHz using microstrip ring resonators (MRRs) and conductor backed coplanar waveguides (CBCPWs). Based on the characterization results, these stack-ups compare favorably against other stack-ups used for applications in this frequency range. After completing the electrical characterization, the Taiyo PID stack-up is also mechanically characterized for its flexibility using Free Arc Bending. The Free Arc Bending test shows that the ultra-thin glass stack-up is suitable for high frequency bending applications as the tested samples are capable of bending up to a separation of 33% of the sample's total length, displaying the capabilities of this ultra-thin glass substrate as a good candidate for a flexible substrate.
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