密封纳米光束在硅光子- mems平台上的热机械噪声测量

2021 IEEE 17th International Conference on Group IV Photonics (GFP) Pub Date : 2021-12-01 DOI:10.1109/GFP51802.2021.9673877

Khannan Rajendran, Awanish Pandey, Pierre Edinger, Gaehun Jo, A. Takabayashi, U. Khan, P. Verheyen, N. Quack, F. Niklaus, W. Bogaerts, K. Gylfason, D. van Thourhout

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引用次数: 0

摘要

测量了真空封装悬垂纳米光束和纳米光子波导在硅光子学- mems平台上的热运动。确定了观察到的力学模态的共振频率和q因子。我们还通过实验估计位移灵敏度为$1.779 \pm 0.022\frac{{{\text{fm}}}}{{\sqrt {{\text{Hz}}} }}$。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform

The thermal motion of a vacuum packaged, sus-pended nano-beam and nanophotonic waveguide on a silicon photonics-MEMS platform is measured. The resonance frequency and Q-factor of the observed mechanical modes are determined. We also experimentally estimate the displacement sensitivity to be $1.779 \pm 0.022\frac{{{\text{fm}}}}{{\sqrt {{\text{Hz}}} }}$.

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2021 IEEE 17th International Conference on Group IV Photonics (GFP)

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