基于微悬臂梁的光机电力传感器性能的有限元预测

2009 International Symposium on Optomechatronic Technologies Pub Date : 2009-11-10 DOI:10.1109/ISOT.2009.5326044

A. Ghanbari, A. Rostami, M. M. S. Fakhrabadi, F. Janabi-Sharifi

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摘要

本研究的主要目标是提出并开发一种基于两个波导之间光耦合的新型光机电力传感器。本文将研究系统的静态和部分动态特性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Prediction of the behavior of a microcantilever based optomechatronic force sensor by finite element method

The main goal of this study is the presentation and development of a novel optomechatronic force sensor based on optical coupling between two waveguides. Static and partially dynamic behavior of proposed system will be studied here.

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2009 International Symposium on Optomechatronic Technologies

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