用于晶圆光电逆设计的稳健拓扑优化:检查紧凑和任意功率分路器

2021 European Conference on Optical Communication (ECOC) Pub Date : 2021-09-13 DOI:10.1109/ecoc52684.2021.9606156

A. Hammond, J. Slaby, Gareeyasee Saha, S. Ralph

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引用次数: 0

摘要

我们提出了一种新的框架，用于抗标准制造变异性的半导体铸造器件的鲁棒反设计。我们设计并测试了紧凑的50/50、90/10和99/1功率分配器，在商业硅光子工艺上跨多个晶圆采样，在100 nm带宽上显示<±2%的偏差。

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Robust Topology Optimization for Foundry-Photonics Inverse Design: Examining Compact and Arbitrary Power Splitters

We present a novel framework for robust inverse-design of semiconductor-foundry devices tolerant to standard fabrication variability. We designed and tested compact 50/50, 90/10, and 99/1 power splitters sampled across multiple wafers on a commercial silicon photonic process, demonstrating < ±2% deviation over 100 nm of bandwidth.

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2021 European Conference on Optical Communication (ECOC)

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