低功耗三材料异质栅堆叠氧化物双栅TFET的介电袋及功函数工程研究

Priyanka Karmakar, P. K. Sahu
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引用次数: 0

摘要

利用Sentaurus TCAD模拟研究了三材料双栅隧道场效应管漏极和源极中介电袋(DiP)与异质栅堆氧化物的影响。所提出的器件结构在源通道(SP)和漏极通道(DP)结处引入了优化的dip。异质栅极叠加氧化物改善了栅极与通道之间的耦合,改善了导通电流和亚阈值摆幅(SS)。高钾DiP (Hf02)的存在放大了DP下的耗尽层;结果,漏极侧隧穿宽度(WTunneling)增大,双极导率明显下降。SP处低k DiP (SiO2)的存在降低了源侧的隧穿效应,提高了器件的驱动电流,同时增加了源侧电荷粒子的隧穿概率。通过引入dip,器件的性能比传统的TFET得到了增强,包括更低的SS、off电流(IOFF)和DIBL,更高的on电流(ION)和跨导,以及抑制泄漏电流和提高离子/IOFF比。直流特性和交流/射频参数结果表明,该器件适用于低功率高频应用
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Investigation of Dielectric Pocket and Work function Engineering in Triple Material Hetero Gate Stack Oxide Double Gate TFET for Low Power Applications
The impact of dielectric pockets (DiP) in the drain and source side in the triple material double gate Tunnel FET along with hetero-gate stack oxide is demonstrated using Sentaurus TCAD simulations. The proposed device structure introduces the optimized DiPs at the source-channel (SP) and drain-channel (DP) junctions. The hetero gate stacked oxide improves the coupling between the gate and the channel and improves the ON current and subthreshold swing (SS). The presence of high-k DiP (Hf02) at the DP magnifies the depleted layer under the DP; as a result, the tunneling width (WTunneling) at the drain-side amplifies, and there is a remarkable decline in the ambipolar conduction. The presence of the low-k DiP (SiO2) at SP reduces the WTunneling at the source-side, improving the driving current of the device as the tunneling probability of charge particles increases at the source-side. By introducing the DiPs, there is an enhancement in the device's performance over conventional TFET in terms of lower SS, OFF-current (IOFF), and DIBL, higher ON-current (ION), and transconductance, and suppressed leakage current and improved ION/IOFF ratio. The DC characteristics and AC/RF parameter results illustrate that the device proposed is appropriate for applications of low power and high frequency
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