半导体失效分析报告分类

Frederik Platter, Anna Safont-Andreu, C. Burmer, Konstantin Schekotihin
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引用次数: 3

摘要

在日常工作中,故障分析(FA)实验室的工程师生成大量文档,报告他们处理的每个设备的所有任务、发现和结论。这些数据为实验室存储了其他专家可以参考的有价值的知识,然而,它的性质,作为报告具体设备及其相应过程的个人报告,使得为人类专家提供咨询的效率低下。在此背景下,本文提出了一种人工智能解决方案,用于收集存储在实验室生成的众多文档中的FA知识。因此,我们生成了FA报告的数据集以及相应的电子签名和物理故障,以便训练不同的监督分类器。结果表明,这些模型能够捕捉到不同工作背后的模式,并预测原因,对物理假设的结果稍好一些。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Report Classification for Semiconductor Failure Analysis
In their daily work, engineers in the Failure Analysis (FA) laboratory generate numerous documents reporting all their tasks, findings, and conclusions regarding every device they are handled. This data stores valuable knowledge for the laboratory that other experts can consult, however, the nature of it, as individual reports reporting concrete devices and their corresponding processes, makes it inefficient to consult for the human experts. In this context, the following paper proposes a Artificial Intelligence solution for the gathering of this FA knowledge stored in the numerous documents generated in the laboratory. Therefore, we have generated a dataset of FA reports along with their corresponding electrical signatures and physical failures in order to train different supervised classifiers. The results show that the models are able of capturing the patterns underlying the different jobs and predict the causes, showing slightly better results for the physical hypotheses.
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