{"title":"基于电阻的MEMS频率参考温度传感器","authors":"M. Shahmohammadi, Kianoush Souri, K. Makinwa","doi":"10.1109/ESSCIRC.2013.6649113","DOIUrl":null,"url":null,"abstract":"This paper presents a CMOS temperature sensor intended for the temperature compensation of MEMS frequency references. It is based on a Wien bridge RC filter, whose phase-shift, due to the temperature dependency of the resistors used, is temperature dependent. This phase shift is then digitized by a phase domain sigma-delta modulator. The sensor was implemented in 0.18μm CMOS, consumes 36 μW and achieves 6mK resolution in a conversion time of 100msec. After batch calibration and a 3-point trim, it achieves ±0.15°C (3σ) inaccuracy over the industrial range (-40°C to 85°C).","PeriodicalId":183620,"journal":{"name":"2013 Proceedings of the ESSCIRC (ESSCIRC)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"34","resultStr":"{\"title\":\"A resistor-based temperature sensor for MEMS frequency references\",\"authors\":\"M. Shahmohammadi, Kianoush Souri, K. Makinwa\",\"doi\":\"10.1109/ESSCIRC.2013.6649113\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a CMOS temperature sensor intended for the temperature compensation of MEMS frequency references. It is based on a Wien bridge RC filter, whose phase-shift, due to the temperature dependency of the resistors used, is temperature dependent. This phase shift is then digitized by a phase domain sigma-delta modulator. The sensor was implemented in 0.18μm CMOS, consumes 36 μW and achieves 6mK resolution in a conversion time of 100msec. After batch calibration and a 3-point trim, it achieves ±0.15°C (3σ) inaccuracy over the industrial range (-40°C to 85°C).\",\"PeriodicalId\":183620,\"journal\":{\"name\":\"2013 Proceedings of the ESSCIRC (ESSCIRC)\",\"volume\":\"61 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-10-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"34\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 Proceedings of the ESSCIRC (ESSCIRC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ESSCIRC.2013.6649113\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 Proceedings of the ESSCIRC (ESSCIRC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESSCIRC.2013.6649113","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A resistor-based temperature sensor for MEMS frequency references
This paper presents a CMOS temperature sensor intended for the temperature compensation of MEMS frequency references. It is based on a Wien bridge RC filter, whose phase-shift, due to the temperature dependency of the resistors used, is temperature dependent. This phase shift is then digitized by a phase domain sigma-delta modulator. The sensor was implemented in 0.18μm CMOS, consumes 36 μW and achieves 6mK resolution in a conversion time of 100msec. After batch calibration and a 3-point trim, it achieves ±0.15°C (3σ) inaccuracy over the industrial range (-40°C to 85°C).
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