圆柱形微透镜在聚合物基板上的直接写入

Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI:10.1109/ICSENS.2003.1279049

E. Bormashenko, R. Pogreb, Y. Socol, M.H. Itzhaq, S. Sutovski, A. Sheshnev, Y. Bormashenko

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引用次数: 2

摘要

研究了CO/亚2/激光辐照聚偏氟乙烯基(PVDF)制备圆柱微透镜和微透镜阵列的方法。圆柱微透镜广泛应用于各种光学传感技术。该工艺制备的微透镜在宽的中红外波段是透明的，因此微透镜可用于各种红外光学应用。PVDF的特点是具有很强的压电性能。因此，微透镜在集成光学方案中的应用是可能的。提出了一种研究微透镜截面的实验技术。研究了微透镜的聚焦能力。用远场衍射法研究了微透镜在可见光区的光学质量。

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Direct writing of cylindrical microlenses on polymer substrates

The fabrication of cylindrical microlenses and microlens arrays by CO/sub 2/ laser irradiation of polyvinylidene fluoride substrates (PVDF) has been demonstrated. Cylindrical microlenses are extensively used for various optical sensing techniques. Microlenses obtained by the proposed process are transparent in the broad middle-IR band, so microlenses could be used for various IR optics applications. PVDF is distinguished by its strong piezoelectric properties. Thus applications of the microlenses in the integrated optic schemes are possible. An experimental technique allowing study of microlens cross-sections was developed. The focusing ability of the microlenses was studied. The optical quality of the microlenses in the visible region was examined by far-field diffraction study.

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Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)

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