{"title":"谐振微束压力传感器的测量","authors":"Deyong Chen, D. Cui","doi":"10.1109/ICIA.2004.1373357","DOIUrl":null,"url":null,"abstract":"Operation and measurement of an electro-thermally excited resonant pressure sensor are described. An open-loop measuring system with lock-in amplification technology is established to assess the characteristics of the beam resonator and in order to solve the problem of detecting dynamic relationships between various sensors' output frequency and their applied conditions, a close-loop data-acquisition system is developed and the gage factor, temperature sensitivity and frequency stability are measured with the system.","PeriodicalId":297178,"journal":{"name":"International Conference on Information Acquisition, 2004. Proceedings.","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Measurement of resonant microbeam pressure sensors\",\"authors\":\"Deyong Chen, D. Cui\",\"doi\":\"10.1109/ICIA.2004.1373357\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Operation and measurement of an electro-thermally excited resonant pressure sensor are described. An open-loop measuring system with lock-in amplification technology is established to assess the characteristics of the beam resonator and in order to solve the problem of detecting dynamic relationships between various sensors' output frequency and their applied conditions, a close-loop data-acquisition system is developed and the gage factor, temperature sensitivity and frequency stability are measured with the system.\",\"PeriodicalId\":297178,\"journal\":{\"name\":\"International Conference on Information Acquisition, 2004. Proceedings.\",\"volume\":\"13 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-06-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Conference on Information Acquisition, 2004. Proceedings.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICIA.2004.1373357\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Information Acquisition, 2004. Proceedings.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIA.2004.1373357","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Measurement of resonant microbeam pressure sensors
Operation and measurement of an electro-thermally excited resonant pressure sensor are described. An open-loop measuring system with lock-in amplification technology is established to assess the characteristics of the beam resonator and in order to solve the problem of detecting dynamic relationships between various sensors' output frequency and their applied conditions, a close-loop data-acquisition system is developed and the gage factor, temperature sensitivity and frequency stability are measured with the system.
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