一种由静电力和光力控制的纳米可调谐振荡器

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI:10.1109/MEMSYS.2015.7050882

J. G. Huang, B. Dong, H. Cai, Y. D. Gu, J. H. Wu, T. N. Chen, Z. Yang, Y. Jin, Y. Hao, D. Kwong, A. Liu

{"title":"一种由静电力和光力控制的纳米可调谐振荡器","authors":"J. G. Huang, B. Dong, H. Cai, Y. D. Gu, J. H. Wu, T. N. Chen, Z. Yang, Y. Jin, Y. Hao, D. Kwong, A. Liu","doi":"10.1109/MEMSYS.2015.7050882","DOIUrl":null,"url":null,"abstract":"We develop a miniaturized electrostatically tunable optomechanical oscillator, whose frequencies can be electrostatically tuned by as much as 10%. By taking advantage of the optical and the electrical spring, the oscillator achieves a high tuning sensitivity without resorting to mechanical tension. Particularly, the high-Q optical cavity greatly enhances the system sensitivity, making it extremely sensitive to the motional signal, which is often overwhelmed by background noise.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"154 5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"A nanomachined tunable oscillator controlled by electrostatic and optical force\",\"authors\":\"J. G. Huang, B. Dong, H. Cai, Y. D. Gu, J. H. Wu, T. N. Chen, Z. Yang, Y. Jin, Y. Hao, D. Kwong, A. Liu\",\"doi\":\"10.1109/MEMSYS.2015.7050882\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We develop a miniaturized electrostatically tunable optomechanical oscillator, whose frequencies can be electrostatically tuned by as much as 10%. By taking advantage of the optical and the electrical spring, the oscillator achieves a high tuning sensitivity without resorting to mechanical tension. Particularly, the high-Q optical cavity greatly enhances the system sensitivity, making it extremely sensitive to the motional signal, which is often overwhelmed by background noise.\",\"PeriodicalId\":337894,\"journal\":{\"name\":\"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"154 5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-03-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2015.7050882\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2015.7050882","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

我们开发了一种小型化的静电可调谐光机械振荡器，其频率可静电调谐高达10%。通过利用光学和电子弹簧，振荡器实现了高调谐灵敏度，而无需诉诸机械张力。特别是高q光腔大大提高了系统的灵敏度，使其对运动信号极其敏感，而运动信号往往被背景噪声淹没。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

A nanomachined tunable oscillator controlled by electrostatic and optical force

We develop a miniaturized electrostatically tunable optomechanical oscillator, whose frequencies can be electrostatically tuned by as much as 10%. By taking advantage of the optical and the electrical spring, the oscillator achieves a high tuning sensitivity without resorting to mechanical tension. Particularly, the high-Q optical cavity greatly enhances the system sensitivity, making it extremely sensitive to the motional signal, which is often overwhelmed by background noise.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

自引率

0.00%

发文量