混合模式光学监测-在同一镀膜过程中的单色和宽带算法

S. Waldner, J. Buchholz, Rico Benz
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引用次数: 1

摘要

具有高信号质量的宽带监测可以在同一涂层运行中同时使用宽带和单色层终止算法。带通滤波器和吸收层的例子显示了这种“混合”方法的好处。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Hybrid Mode Optical Monitoring – Monochromatic and Broadband Algorithms in the same Coating Process
Broadband monitoring with high signal quality enables using both broadband and monochromatic layer termination algorithms in the same coating run. Examples of a bandpass filter and an absorbing layer show the benefits of this “hybrid” approach.
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