粘性导电液体对倾斜c轴ZnO薄膜厚度剪切振动的影响

2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Pub Date : 2015-10-01 DOI:10.1109/SPAWDA.2015.7364525

Xian Fu, Jianke Du, J. Lou, Ji Wang, T. Ma, Bin Huang, Li-wen He

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引用次数: 0

摘要

分析了c轴倾斜的430 ZnO薄膜一侧接触一层粘性导电液体时的厚度剪切振动。利用三维线性压电理论推导了频率方程。详细分析和讨论了电导率对谐振频率位移的影响。通过设定液体的密度、粘性系数和厚度，得到谐振频率的位移与电导率的关系。结果表明，在一定范围内，随着电导率的增大，谐振频率的位移减小。分析方法和计算结果可为谐振器的设计提供重要参考。

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Effects of a viscous and conductive liquid on thickness shear vibration of ZnO films with tilted c-axis orientation

The thickness-shear vibration of c-axis tilted 430 ZnO thin film, one side of it is contacted with a layer of viscous conductive liquids is analyzed. The frequency equation has been derived from the three-dimensional linear piezoelectricity theory. The effects of conductivity on the shift in the resonant frequency has been analyzed and discussed in detail. By setting the density, the viscous coefficient and the thickness of the liquid as specified values, the relation of the shift in the resonant frequency and the conductivity is obtained. The present results demonstrate that the shift in the resonant frequency decreases with the conductivity in a special range. Analysis method and calculation results can provide important reference to the resonators design.

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2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)

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