SOI中亚波长光栅波导的三维仿真与表征

Numerical Simulation of Optoelectronic Devices, 2014 Pub Date : 2014-10-27 DOI:10.1109/NUSOD.2014.6935394

Thomas Fohn, N. Hoppe, W. Vogel, Martin Schmidt, M. F. Rosa, M. Berroth, Jorg Butschke, F. Letzkus

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引用次数: 2

摘要

采用特征模展开法对硅亚波长光栅波导的光谱特性进行了三维模拟，并研究了包含模数对光谱特性的影响。仿真结果与实测结果进行了对比验证。

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3D-simulation and characterization of subwavelength grating waveguides in SOI

Spectral properties of silicon subwavelength grating waveguides are simulated in 3D with eigenmode expansion and the impact of the number of included modes is investigated. Simulation results are validated against measurements.

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Numerical Simulation of Optoelectronic Devices, 2014

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