Precision Ellipsometry for Quantitative Real-Time Monitoring of Molecular Layers

MCMS .MS.ID.000520. Abstract Precision ellipsometry (PREL) is optical technique that uses polarization modulator to measure changes in the state of light polarization reflected off a surface of a material. Based on new modulation concept, a polarization modulator was made, which is compact, non-magnetic, consuming low power. With this modulator, a portable PREL system was made and was shown to have sensitivity at molecular level via experiments on attachment of various molecules on silicon surface from air and from water. Real-time measurements of kinetics of molecular binding gave insights into mechanisms of the binding and gave directions to improvement of technology of fabrication of