高分辨率纳米位移测量中的非线性校正

2008 International Symposium on High Capacity Optical Networks and Enabling Technologies Pub Date : 2008-11-01 DOI:10.1109/HONET.2008.4810220

S. Olyaee, S. Hamedi

{"title":"高分辨率纳米位移测量中的非线性校正","authors":"S. Olyaee, S. Hamedi","doi":"10.1109/HONET.2008.4810220","DOIUrl":null,"url":null,"abstract":"In this paper, a simple method to reduce the nonlinearity in the high-resolution nano-displacement measuring system using a modified laser interferometer is presented. By using a retarder plate and improved optical head, in additional to the nonlinearity compensation, the resolution of the displacement measurement is doubled and quadrupled compared to the conventional three- and two-mode laser interferometers, respectively. In the particular case, the nonlinearity of 18.4 nm is reduced to a value of 140 pm.","PeriodicalId":433243,"journal":{"name":"2008 International Symposium on High Capacity Optical Networks and Enabling Technologies","volume":"154 ","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Correction of Nonlinearity in High-Resolution Nano-Displacement Measurements\",\"authors\":\"S. Olyaee, S. Hamedi\",\"doi\":\"10.1109/HONET.2008.4810220\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, a simple method to reduce the nonlinearity in the high-resolution nano-displacement measuring system using a modified laser interferometer is presented. By using a retarder plate and improved optical head, in additional to the nonlinearity compensation, the resolution of the displacement measurement is doubled and quadrupled compared to the conventional three- and two-mode laser interferometers, respectively. In the particular case, the nonlinearity of 18.4 nm is reduced to a value of 140 pm.\",\"PeriodicalId\":433243,\"journal\":{\"name\":\"2008 International Symposium on High Capacity Optical Networks and Enabling Technologies\",\"volume\":\"154 \",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 International Symposium on High Capacity Optical Networks and Enabling Technologies\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/HONET.2008.4810220\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 International Symposium on High Capacity Optical Networks and Enabling Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/HONET.2008.4810220","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 3

摘要

本文提出了一种利用改进的激光干涉仪降低高分辨率纳米位移测量系统非线性的简单方法。在非线性补偿的基础上，采用缓速板和改进型光学头，位移测量的分辨率分别是传统三模和双模激光干涉仪的两倍和四倍。在特殊情况下，18.4 nm的非线性减小到140 pm的值。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Correction of Nonlinearity in High-Resolution Nano-Displacement Measurements

In this paper, a simple method to reduce the nonlinearity in the high-resolution nano-displacement measuring system using a modified laser interferometer is presented. By using a retarder plate and improved optical head, in additional to the nonlinearity compensation, the resolution of the displacement measurement is doubled and quadrupled compared to the conventional three- and two-mode laser interferometers, respectively. In the particular case, the nonlinearity of 18.4 nm is reduced to a value of 140 pm.

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2008 International Symposium on High Capacity Optical Networks and Enabling Technologies

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