基于变间距凹燃烧光栅的小型化双通道宽带光谱仪

A. Shcheglov, Yunfeng Nie, Hugo Thienpont, H. Ottevaere
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引用次数: 0

摘要

摘要近年来,从科学研究到日常生活,例如食品安全和空气污染分析,越来越多地应用于高性价比的便携式光谱仪已成为一种趋势。虽然大多数光谱仪使用平面光栅,但我们展示了一种更小型化的双通道宽带光谱仪,该光谱仪基于变间距凹光栅,将成像光学和衍射光栅的功能结合在一个组件中。微尺寸光栅间距增加的设计自由度进一步校正了大部分光学像差,从而实现了具有高光谱分辨率的<26 × 12 × 10 mm3的微小体积。仿真结果表明,vis通道(400 ~ 790 nm)的光学分辨率<1.6 nm, nir通道(760 ~ 1520 nm)的光学分辨率<3.1 nm。光栅槽的闪耀结构在整个光谱范围内提供了较高的衍射效率,平均大于50%。为了进一步验证批量生产的可行性,我们成功地利用金刚石模具制造了主模,并通过热压成型进行了复制。我们制作的可变间距光栅复制品在vis通道中衍射效率高达70%,在nir通道中高达60%。我们用自制的凹面光栅构建了原型,实验结果表明光谱分辨率与标称设计匹配良好(误差< 7%)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Miniaturized two-channel broadband spectrometer based on variable-spacing concave blazed gratings
Abstract. Recently, it becomes a tendency for cost-effective, portable spectrometers to have more applications from scientific research to daily life, e.g., in food safety and air pollution analysis. While most spectrometers utilize plane gratings, we demonstrate a more miniaturized, two-channel, broadband spectrometer based on variable-spacing concave gratings, combining the functionality of imaging optics and diffraction grating in one component. The added degree of design freedom in the micro-sized grating spacing further corrects most optical aberrations, thus the design achieves a tiny volume of <26  ×  12  ×  10  mm3 with a high spectral resolution. Simulation results show an optical resolution of <1.6  nm in the VIS-channel (400 to 790 nm) and <3.1  nm in the NIR-channel (760 to 1520 nm). The blazed structure of grating grooves provides a high overall diffraction efficiency in the whole spectral range, more than 50% on average. To further validate the feasibility for mass production, we successfully manufactured the variable-spacing concave gratings by using diamond tooling for fabricating the master mold and hot embossing for replication. Our fabricated variable-spacing grating replicas have a diffraction efficiency up to 70% in the VIS-channel and up to 60% in the NIR-channel. We built the prototype with fabricated concave gratings, and experimental results show a good match (error  <  7  %  ) in spectral resolution with the nominal design.
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