化学传感器用硅光子双盘谐振器的研制

Bo Li, C. Ho, Chengkuo Lee
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摘要

本文报道了一种新型的具有增强质量因子的窃窃廊模式光子双盘谐振器(DDR)。与主盘尺寸相同的第二盘提高了母线波导与圆盘谐振器的耦合效率。光盘的设计带来了更小的器件尺寸和大集成光电路在一个芯片上的可能性。测量结果显示自由光谱范围(FSR)为25 nm,与三维时域有限差分(FDTD)仿真结果吻合良好。用不同液体包层的液滴填充传感孔,演示了化学指标的传感。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of silicon photonics dual disks resonators as chemical sensors
This paper reports a novel whispering gallery mode photonic dual-disk resonator (DDR) with enhanced quality factors. The second disk with the same dimension as the primary disk enhances the coupling efficiency of the bus waveguide and the disk resonators. The compact disk design brings the possibilities of smaller device dimension and large integration of optical circuits on a chip. The measured result shows 25 nm of free spectrum range (FSR) and the data has a good agreement with three dimensional (3-D) finite difference time domain (FDTD) simulation results. Chemical index sensing is demonstrated with a sensing opening hole filled with droplet of different liquid cladding.
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