氧化条件下钛电极的真空电击穿特性及表面化学成分

XXIst International Symposium on Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV. Pub Date : 2004-09-27 DOI:10.1109/DEIV.2004.1418606

Y. Yamano, S. Kobayashi, V. Saito

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引用次数: 3

摘要

从电极放气被认为是导致真空中电气击穿的因素之一。已有报道称，钛的氧化处理温度为200°C，由于其表面形成了薄而细的氧化层，可以有效地减少脱气。不同氧化条件下(未氧化)钛电极击穿特性。在200°C和450°C的氧化条件下进行了研究和比较，以阐明氧化处理对击穿特性的依赖性。此外，通过x射线光电子能谱(XPS)分析了500次重复击穿前后电极表面的化学成分。实验表明，在200℃氧化条件下，第一次施加电压时击穿场最大，调理效果显著。

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Vacuum electrical breakdown characteristics and surface chemical compositions of titanium electrodes with oxidation conditions

Outgassing from an electrode is regarded as one of factors leading electrical breakdowns in vacuum. It was already reported that oxidation treatment 200°C for titanium is effective to reduce outgassing because of its thin and fine oxide layer created on the surface. Breakdown characteristics of titanium electrodes with different oxidation conditions (without oxidation. with oxidation at 200°C and 450°C) were investigated and compared, in order to clarify the dependence of the oxidation treatment on the breakdown characteristics. In addition, chemical composition on the electrode surface was analyzed by X-ray Photoelectron Spectroscopy (XPS) before and after 500 repetitive breakdowns. Experiments clarified that breakdown field at the first voltage application is highest and conditioning effect is significant for the electrodes at 200°C oxidation.

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来源期刊

XXIst International Symposium on Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV.

CiteScore

0.40

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0.00%

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