双材料栅极硅绝缘体(DMGSOI) -设计对线性的影响

N. Jafar, N. Soin
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引用次数: 0

摘要

本文介绍了在完全耗尽的绝缘体上硅(SOI)器件上实现双材料栅极(DMG)对线性性能的影响,并与标准单材料栅极(SMG) SOI器件进行了比较。进行的线性研究考虑了DMG特性的影响,即栅极长度比(L1:L2)和栅极功函数差(ΔΦM),硅厚度(TSi)和阈值电压(VTH)设置,使用ATLAS 2D模拟。分析的重点是栅极偏置条件,它决定了饱和水平,与获得最小的线性退化有关。基于所得结果,DMG器件始终表现出比SMG器件更好的线性性能,并通过施加更高的ΔΦM和TSi进一步改善。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Dual Material Gate Silicon on Insulator (DMGSOI) - Design impact on linearity
This paper presents the impact of implementing Dual Material Gate (DMG) onto a fully depleted Silicon On Insulator (SOI) device on linearity performance as compare to the standard Single Material Gate (SMG) SOI device. Linearity study performed takes into account the influences of DMG properties namely gate length ratio (L1:L2) and gate workfunction difference (ΔΦM), silicon thickness (TSi) and threshold voltage (VTH) setting simulated using ATLAS 2D. Analysis focus on gate bias condition which determine the saturation level, relevant for obtaining minimal linearity degradation. Based on results obtained, DMG device consistently show better linearity performance than its SMG counterparts with further improvement by applying higher ΔΦM and TSi.
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