大口径NIF光学元件的高精度镀膜技术

Pub Date : 2001-07-15 DOI:10.1364/OIC.2001.THD2
J. Oliver, J. Howe, A. Rigatti, Douglas J. Smith, C. Stolz
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引用次数: 14

摘要

用于NIF的大孔径涂层必须保持高激光损伤阈值、低薄膜应力、高均匀性和精确的光谱特性。将提供涂层过程的细节以及生产结果。
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High precision coating technology for large aperture NIF optics
The large aperture coatings for NIF must maintain high laser damage thresholds, low film stress, high uniformity and precise spectral characteristics. Details of the coating process will be provided as well as results from production.
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