Manufacturing and structure investigation of TiN-Al2O3-multilayers

Abstract

Wear resistant multilayers consisting of the components TiN and Al₂O₃ are deposited on WC-Co-hardmetal substrates by plasma assisted chemical vapour deposition (PACVD) using different variants. Cross sections of the layered system are investigated by means of analytical transmission electron microscopy (TEM). Correlations between the layer formation and the nanostructure of the layers are revealed. Electron energy loss spectroscopy (EELS) in the scanning mode is used for the investigation of nanoscale interface regions, whereby both element- and bonding specific signals are used for characterization.