Spatial Resolution and Measurement Accuracy of Dielectric Microscope Using Non-contact State Microwave Probe

Abstract

The dielectric measurement for microscopic area of multi-layer ceramics capacitor was carried out by microwave microscope using non-contact microwave probe. The phase of incidence microwave for sample was fixed to pi/2 in order to realize accurate measurement of sample. The spatial resolution for dielectric measurement was increased based on Kirchhoff's diffraction theory with decreasing coaxial cable and probe diameter. From reflection intensity mapping, the dielectric permittivity distribution in microscopic area at GHz order was measured for cross section of multi-layer ceramics capacitor at room temperature. The spatial resolution was experimentally estimated to be about 10 mum from mapping of cross section view of dielectric and inner electrode layers in multi layer ceramics capacitor.