Micro-Machining of Glass by Excimer Laser Ablation

Conference on Lasers and Electro-Optics Europe Pub Date : 1998-01-01 DOI:10.1109/CLEOE.1998.719464

F. V. Alvensleben, C. Graumann, J. Wais

引用次数: 0

Abstract

Micro-structuring of glass has been examined using UV radiation. The etch depth profile has been investigated. The limitations and possibilities for micro-structuring on glass has been found for the wavelengths of 193nm, 248nm and 308nm.

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准分子激光烧蚀玻璃微加工研究

利用紫外辐射对玻璃的微结构进行了研究。对腐蚀深度剖面进行了研究。发现了在193nm、248nm和308nm波长下玻璃微结构的局限性和可能性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Conference on Lasers and Electro-Optics Europe

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