Design and simulation of readout circuit for mems sensor

G. Bhanuteja, V. S. Nagaraja, J. Sowmya, S. Pinjare
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Abstract

Output from any MEMS Sensor usually lacks the power that can be fed directly to any interface circuit. Hence there is a need to add additional circuitry in between the output of the MEMS sensor and the interface circuit. In this paper the authors have compared two combinations of modulator / demodulator circuitry which can be used in the readout circuitry for any MEMS sensors. The two combinations are Gilbert multiplier as modulator and demodulator and the second one is Gilbert Multiplier as Modulator and Chopper circuit as demodulator. A detailed analysis of the two combinations is presented in the paper. The simulations were carried out using gpdk 350nm technology file in Cadence tool. The layout has been generated for each block and DRC and back annotation has been done to note overall circuit delay as 118ns.
mems传感器读出电路的设计与仿真
任何MEMS传感器的输出通常缺乏可以直接馈送到任何接口电路的功率。因此,需要在MEMS传感器的输出和接口电路之间添加额外的电路。本文比较了两种可用于任何MEMS传感器读出电路的调制/解调电路组合。两种组合是吉尔伯特乘法器作为调制器和解调器,第二种组合是吉尔伯特乘法器作为调制器和斩波电路作为解调器。本文对这两种组合进行了详细的分析。采用gpdk 350nm工艺文件在Cadence工具中进行仿真。已经为每个块和DRC生成了布局,并且已经做了反向注释,以注意整个电路延迟为118ns。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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