Surface-micromachined MEMS corner cube retro-reflector array

Abstract

A linear array of MEMS corner cube retro-reflectors (CCR) fabricated with the MUMPs polysilicon surface micromachining process is presented. The CCR's opening faces straight upwards, providing ease of use and better field of view. Tunability can be achieved by employing a drivable mirror as one of the CCR's three mirrors. A novel idea of assembling an N × N CCR array is also proposed.