Charge state fractions of sputtered Ni

Abstract

Energy distributions of sputtered Ni ions and neutrals were measured at non-normal incidence of Ne and Ar ions. Only the Ni particles sputtered in a binary collision can be used for the determination of the charge state fractions. Monte Carlo simulations (TRIM SP) were used for the absolute calibration of the total intensity in the binary recoil peak. The charged fractions are found to be less than 10% for energies below 5 keV. The positive fraction is about one order of magnitude larger than the negative and the doubly charged fractions.